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        首頁 > 論文 > 激光與光電子學進展 > 56卷 > 16期(pp:163201--1)

        基于激光干涉燒蝕的硅表面微納結構制備研究

        Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation

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        摘要

        基于納秒激光雙光束干涉燒蝕技術,輔助利用濕法腐蝕技術,并結合時域有限差分法,從實驗和理論上分析研究了硅表面不同周期微納結構的制備和形成機制。結果表明:波長為355 nm的納秒激光,可在硅表面干涉燒蝕出600 nm以上周期的微納結構;結構深度隨功率或曝光時間的增加而加深,最大深度可達到激光的趨膚深度約50 nm;結構周期在曝光時間大于5 s時發生劈裂減半,最小可以得到300 nm的周期;通過時域有限差分(FDTD)的理論模擬發現,已形成結構對干涉光場的調制是結構劈裂的最主要原因。這些研究將在表面周期性微納結構的制備、無掩模快速加工設備的研制、以及激光與物質的相互作用等方面有很大的應用前景。

        Abstract

        Based on nanosecond laser two-beam interference ablation assisted with wet-etching method and finite difference time domain (FDTD) simulation, the formation of structures on silicon is studied experimentally and theoretically. The results show that it is possible for the fabrication of structures with period more than 600 nm by a nanosecond laser with wavelength of 355 nm. The structure depth becomes deeper with the increasing of power or exposure time. The maximum depth is equal to the skin depth of laser, about 50 nm. Further, the period splits into half when the exposure time is more than 5 s, which brings a method to obtain a minimum period of 300 nm. The FDTD simulation confirms that the modulation of formed structures to the interference field is the reason for period splitting. The research shows great potential applications for the fabrication of periodic micro/nanostructures, design of maskless processing facilities, and laser-matter interactions.

        Newport宣傳-MKS新實驗室計劃
        補充資料

        DOI:10.3788/LOP56.163201

        所屬欄目:超快光學

        收稿日期:2019-02-14

        修改稿日期:2019-03-27

        網絡出版日期:2019-08-01

        作者單位    點擊查看

        王子涵:吉林大學電子科學與工程學院集成光電子國家重點實驗室,吉林 長春 130012
        王寶續:吉林大學電子科學與工程學院集成光電子國家重點實驗室,吉林 長春 130012
        釜野勝:阿南工業高等專門學校, 日本 阿南 7740017
        徐微微:阿南工業高等專門學校, 日本 阿南 7740017

        聯系人作者:徐微微(xu0611318weiwei@163.com)

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        引用該論文

        Zihan Wang, Baoxu Wang, Masaru Kamano, Weiwei Xu. Fabrication of Silicon Micro/Nanostructures Based on Laser Interference Ablation[J]. Laser & Optoelectronics Progress, 2019, 56(16): 163201

        王子涵, 王寶續, 釜野勝, 徐微微. 基于激光干涉燒蝕的硅表面微納結構制備研究[J]. 激光與光電子學進展, 2019, 56(16): 163201

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